ECE5838 · Microsystems and semiconductor fabrication

Overview

Get ready to dive into the fascinating world of semiconductor devices, microsensors, microactuators, and the microtechnologies that power them. In this unit, you’ll explore the core principles and materials behind MEMS and semiconductor devices, and learn how to characterise them electrically and mechanically. You’ll investigate essential MEMS structures like cantilever beams and comb drives, as well as patterns for diodes and transistors. You'll also get hands-on with key microfabrication techniques, such as photolithography, etching, deposition, and more. Through lab work, project-based learning, simulations, and device construction, you'll build practical skills that connect directly to real-world applications.

Areas of study: E6013 Master of Applied Engineering - Specialisation: Semiconductors and microsystems engineering

Offerings

Assessment

The Handbook lists an examination for this unit.

Continuous assessment: 50% Final assessment (2 hours and 10 minutes): 50% The assessments in this unit are designed to demonstrate the achievement of the advanced learning outcomes and standards expected of Master’s level coursework.

Assessment details may change. Please refer to the assessment information in Moodle closer to the start of the teaching period.

Requisites

Learning outcomes

1. Explain the principles, instrumentation, microfabrication process, and materials associated with micro-electro-mechanical systems (MEMS) and semiconductor-based devices.
2. Design microsystems emphasising the foundation structures for microsensors and actuators, diodes, transistors, CMOS integrated circuits and analyse their mechanical and electrical characteristics.
3. Propose research and development ideas to advance the areas of microsystem technologies.
4. Carry out microfabrication processes to manufacture micro/semiconductor devices and characterise their performances.

Workload

The minimum total expected workload to achieve the learning outcomes for this unit is 144 hours per semester typically comprising a mixture of 3-6 hours of scheduled learning activities and 6-9 hours of independent study per week. Scheduled activities may include a combination of teacher-directed learning, peer-directed learning and online engagement. Independent study may include associated readings, assessment and preparation for scheduled activities.

Student experience, not official rules. Nothing here changes what the Handbook says.